Applied Materials' Semiconductor Equipment Donated to MIT
Two semiconductor fabrication systems manufactured by Applied Materials, Inc. have been donated to the Microsystems Technology Laboratories of the Massachusetts Institute of Technology (MIT) in Cambridge, Massachusetts. A Centura wafer etching system was donated jointly with Motorola Semiconductor Products Sector; Applied Materials also presented MIT with an Endura PVD (physical vapor deposition) system. Both systems are capable of performing state-of-the-art 0.18 micron processing and will be used to conduct research on new thin film materials and process technology.
Dr. Tom Magnanti, Dean Of Engineering at MIT, said, "This donation of advanced semiconductor equipment represents a very high level of collaboration between industry and a university. Having two of Applied Materials' systems in our lab will allow MIT to retain its position as one of the most advanced electronics research universities and help our students perform research that is highly relevant to future semiconductor industry requirements."
The Endura and Centura systems perform key process steps during the making of a chip. The Endura PVD system is used to deposit metals used as conductors within the chip. The Centura system is configured with process chambers for plasma etching of silicon dioxide, the predominant insulating material used in semiconductor chips. MIT will use the systems to study etching technology, including new chemistries and processes. Both types of systems are in widespread use in chip fabs throughout the world.
"MIT is a critical resource that provides top-tier engineering and scientific talent to the semiconductor manufacturing and equipment industries," said Sass Somekh, Senior Vice President at Applied Materials. "We believe that these tools will lead to a high degree of interaction between MIT and industry researchers. Applied Materials has many MIT alumni on its staff, and this donation will help assure a continuing and fruitful collaboration between MIT and Applied Materials."
"We are pleased to provide an advanced etch system to support the Microsystems Technology Laboratories in extending its fine record of producing excellent research and graduates germane to the semiconductor industry," said Joe Mogab, Manager of Advanced Process Development for Motorola's DigitalDNA Laboratories. "It is an important objective of Motorola to support university research in strategic areas such as semiconductor etching technology."
Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems and services to the global semiconductor industry. Applied Materials' web site is www.appliedmaterials.com.