Dry Vacuum Pumps

The VS Series Dry Screw Primary Pumps are designed for use in a range of semiconductor processing applications demanding a clean, hydrocarbon-free environment. These applications include primary pumping for turbo- and ion-pumped systems, and for cryogenic pump roughing.

The design of these pumps provides superior performance for a wide range of semiconductor fabrication processes, including CVD nitride, metal etch, and polysilicon deposition. The pumps are capable of withstanding significant particulate levels and operate at a high internal temperature to prevent condensation of process chemistry.

Varian Vacuum Technologies, 121 Hartwell Avenue, Lexington, MA 02421 Phone: (800) 8VARIAN.