Multiple Copper ECD Equipment Sale to Manufacturer of Next-Generation Microprocessors
Semitool, Inc., a leading supplier of electrochemical deposition and surface preparation equipment and applications, announced the sale and successful integration of its LT210c copper electrochemical deposition (ECD) tool into a European facility of a next-generation microprocessor manufacturer. The customer has successfully integrated copper into its commercial products, relying upon the LT210c to provide the critical copper deposition step.
"Semitool worked closely with the customer to identify critical challenges and develop solutions for the integration of copper interconnect technology. Our extensive experience and state of the art technology in copper ECD resulted in our customer's timely transition to high volume manufacturing in support of it's aggressive product release plan," stated Fabio Gualandris, President and Chief Executive Officer.
Two Semitool LT210c automated platers, equipped with Capsule and the Company's Semy software suite, underwent extensive marathon testing in the fab prior to entering into production. The sale of these two tools will be included in the Company's fiscal first quarter revenue and new order bookings, and an additional tool will be included as a new order booking for delivery in the Company's fiscal second quarter. "These systems are Semitool's third generation of single wafer ECD equipment, having evolved from our experience in ECD equipment and processes acquired since 1993," stated Kazi Heinink, Vice President of Marketing at Semitool. "In this installation, Semitool has demonstrated not only the viability of the LT210c platform and process technology for supporting high volume manufacturing, but also that versatility of the tool can allow customers to effectively and seamlessly integrate the electrochemical deposition process into a copper interconnect production line using any PVD seed layer deposition system," she added.
Commenting on the successful installation ramp to production, Mr. Gualandris stated, "The success our customer has realized in copper implementation is just one example of the readiness and production worthiness of the ECD technology developed at Semitool. We have delivered numerous ECD systems throughout the world. And in the course of the last 6 years, we have developed considerable depth and expertise in the science and technology of ECD. We are proud that our expertise and knowledge can contribute to our customer's success in advanced microprocessor technology and to the semiconductor industry's transition to copper interconnect."
About Semitool, Inc. Semitool designs, manufactures, markets, and services equipment used in the fabrication of semiconductors. The Company's products include batch and single wafer spray surface preparation and cleaning equipment, electrochemical deposition tools for copper interconnect and other metal deposition applications, thermal processing equipment, and software control systems for semiconductor manufacturing equipment. Semy Engineering, Inc. (Semy) is a wholly-owned subsidiary of Semitool, Inc.