Nanometrics Purchases Exclusive License to Certain Technologies From Phase Metrics

Nanometrics, Inc., an industry leader in semiconductor metrology equipment, announced the acquisition of an exclusive license to certain optical tester technologies from Phase Metrics.

The license includes intellectual property and technical information for use exclusively in the semiconductor and flat panel display industries.

"We are pleased to partner with an industry leader such as Phase Metrics," said John Heaton, Nanometrics' President and CEO. "Phase Metrics' technologies are both complementary and compatible with our stand-alone and integrated metrology platforms."

The acquisition of these optical technologies is expected to expedite Nanometrics' development and manufacturing of new metrology systems for the semiconductor industry. Nanometrics' products are designed in stand-alone configurations, as well as insitu configurations for integration into wafer processing systems, such as chemical mechanical planarization (CMP) and chemical vapor deposition (CVD). This key acquisition includes a one-time royalty payment, purchase of certain inventory and an ongoing royalty based on unit sales.

Nanometrics, Inc. is a leading supplier of automated metrology equipment for advanced semiconductor, flat panel display and magnetic head manufacturing. The Company's website is www.nanometrics.com.

Phase Metrics, Inc. is a worldwide leader in the design, manufacture and sale of process and production test equipment for the computer data storage industry. Phase Metrics' website is www.phasemetrics.com.