Semitool Delivers Advanced SpectrumCleaning System to Temic Semiconductors
Semitool, Inc., a leading manufacturer of semiconductor wafer processing equipment for wafer surface preparation and metal deposition for copper interconnect, announced the delivery of a SPECTRUM advanced surface preparation system to TEMIC Semiconductors in Heilbronn, Germany. TEMIC is a leading supplier of communications, automotive, data processing and aerospace ICs and is a wholly owned subsidiary of Atmel Corporation.
The SPECTRUM is Semitool's latest addition to its automated batch wafer cleaning systems product line and builds on more than two decades of experience in on-axis spray technology. The system features a compact, 50-wafer carrierless design and an architecture that includes either one or two process modules, each capable of delivering up to four cleaning solutions in a programmable sequence.
"The SPECTRUM delivered to TEMIC Semiconductors will be used for a wide range of wafer cleaning applications, including critical cleaning. This system incorporates several advanced technologies which provide the user with a high degree of flexibility and exceptional performance," explained Ray Young, Semitool's SPECTRUM Product Manager.
The configuration of the SPECTRUM series purchased by TEMIC Semiconductors is equipped with Semitool's HydrOzone process for photoresist stripping and organic cleaning. HydrOzone is a highly effective process that replaces sulfuric acid and hydrogen peroxide with more environmentally friendly water and ozone.
The system also utilizes the HydrOzone+ process, an extended version of HydrOzone, which provides enhanced cleaning and stripping capability through the use of injected-on-demand, ultra-dilute chemicals in combination with water and ozone gas. Further, the SPECTRUM provides a favorable solution for TEMIC Semiconductors' critical HF-last cleaning processes, by incorporating immersion technology in combination with spray technology.
About Semitool, Inc.
Semitool designs, manufactures, markets, and services equipment used in the fabrication of semiconductors. The Company's products include batch and single wafer spray surface preparation and cleaning equipment, electrochemical deposition tools for copper interconnect and other metal deposition applications, thermal processing equipment, and supervisory control systems for semiconductor manufacturing equipment. The Company's stock trades on the Nasdaq National Market under the symbol SMTL.
About TEMIC Semiconductors
TEMIC Semiconductors, a wholly owned subsidiary of Atmel Corporation, designs, manufactures and markets on a worldwide basis technically advanced integrated circuits to serve communications, automotive, data processing and aerospace markets, using CMOS, BiCMOS, BCDMOS, and SiGe technologies. TEMIC Semiconductors manufacturing facilities are QS-9000 certified (Nantes, France) and ISO-9001 certified (Heilbronn, Germany and Manila, Philippines). Worldwide and local customers are supported by a network of Company sales engineers as well as registered sales representatives and electronic component distributors. Product information may be retrieved from the TEMIC Semiconductors' website at: www.temic-semi.com .