SVG Tightens Grip on APCVD Processing Leadership With Multiple System Order

Silicon Valley Group Thermal Systems announced a multi-million dollar order for multiple 1500 series atmospheric pressure chemical vapor deposition (APCVD) systems. This order was previously recorded in the Company's September 1999 backlog. The systems will be used for shallow trench isolation and pre-metal dielectric deposition for advanced fabs at one of the largest foundry groups in Taiwan.

"This order for more than 10 systems is representative of our customers' vote of confidence in SVG's APCVD systems for the most demanding applications at world leading fabs," said Jeff Kowalski, SVG Thermal Systems president.

The 1500 APCVD system has been specifically designed to meet the challenges of dielectric film deposition for 200 mm wafer manufacturing. It can be utilized in a broad range of applications for both logic and memory manufacturing. The 1500 system offers high throughput, excellent film quality, unprecedented gap-fill capability, low flow temperature in flow glass applications and multiple film capability.

About Silicon Valley Group
Silicon Valley Group is a leading manufacturer of automated wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include photolithography exposure tools; photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems and precision optical components and systems. For more information, visit www.svg.com.